Mass spectrometry improvement on an high current ion implanter
نویسندگان
چکیده
منابع مشابه
High-current Oxygen Ion Implanter for SIMOX
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ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
سال: 2011
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2011.04.086